• Zygo Nextview Optical Profiler
  • SUSS MJB4 Mask Aligner
  • Wet Lab Fume Hoods

The Yale West Campus Cleanroom Core is a shared user facility to support the research activities of faculties from the West Campus Institutes: Nanobiology, Chemical Biology, Cancer Biology, Energy Sciences, Systems Biology, and Microbial Sciences. The Core is initiated to support microfluidic research groups with photolithography tools including a high resolution UV mask aligner, spin coaters, hot plates, solvent, acid and base hoods. Surface characterization tools such as the non-contact optical profiler and optical microscope are also incorporated. 


September 11, 2017
A SUSS MicroTec Mask Aligner (MJB4) has just been installed in West Campus Cleanroom. As the last tool to complete the photolithography setup for microfluidic device design,...
June 2, 2017
Join us on Friday, June 2, at 2pm as we open up the the newly constructed West Campus Cleanroom to our community. As has become a strong tradition, this is another...
April 27, 2017
A Zygo Nexview 3D optical surface profiler was just installed in our West Campus Cleanroom Core. This profiler can measure all surfaces from super-smooth to very rough, with...