Equipment

Process Benches

Photoresist process bench

Features:

  • Stainless steel construction with rear exhaust
  • Two spin processors
  • Multiple hot plates
  • DI waterspray gun, nitrogen gun and vacuum ports
  • Sink with DI water
  • Ultrasonic tank with heating

Acid and Base process bench

Features:

  • Polypropylene construction with rear exhaust
  • DI waterspray gun, nitrogen gun and vacuum ports
  • Sink with DI water
  • Ultrasonic tank with heating

Solvent process bench

Features:

  • Stainless construction with rear exhaust
  • DI waterspray gun, nitrogen gun and vacuum ports
  • Sink with DI water
  • Ultrasonic tank with heating

SUSS UV Mask Aligner

The MJB4 Mask Aligner from SUSS MicroTec is the perfect system for laboratories and small volume production. Easy to use and compact in size, the SUSS MJB4 represents an economical, highly flexible and efficient mask aligner solution for all kinds of R&D applications.

It offers an excellent platform for researchers to develop new
processes and technologies on a highly versatile, stateof-the-art mask aligner platform.

Features:

  • Fast and highly accurate alignment with SUSS Singlefield or Splitfield Microscope
  • HR Optics enables high resolution prints down to 0.5μm
  • Combined SUSS Broadband Optics (UV250/300/400) allows for fast switching between different wavelengths
  • Wafer and substrate handling up to 100 mm
  • Upgradable with a UV-Nano Imprint Lithography (NIL) toolkit

Manufacturer product page

Zygo 3D Optical Profiler

Nexview™ profiler represents a significant advantage over other metrology methods. A fully automated optical head makes configuration
of advanced metrology applications easy, robust and repeatable. Interactive user-configurable data plots reveal surface characteristics
through traditional 2D and 3D plots, as well as more advanced slope analysis, PSD, and true color imaging.

Features:

  • Excels at measuring all surfaces – from super-smooth to very rough, with sub-nanometer precision, independent of field of view.
  • Measurement types include flatness, roughness, large steps and segments, thin films, and steep slopes, with feature heights ranging from < 1 nm up to 20000 µm.
  • No-compromise profiling – for all types of surfaces, from rough to super smooth, including thin films, steep slopes, and large steps.
  • Gage capable performance – exceptional precision and repeatability for the most demanding production applications.

Manufacturer product page

Westar Resist Spin Coater

The Westar ProSpin-6 is a smart, powerful and easy to use single wafer spin processor.

Features:

  • Fits wafers up to 6” or substrates up to 4” x 4”
  • Programmable digital motor speed control, +/- 0.5% speed regulation, CW/CCW rotation and acceleration.
  • Easy process recipe creation and editing on or off the system.
  • Up to 999 steps per recipe, stores 1000s of recipes on internal compact flash or external thumb drive.
  • Wear compensating rotary vacuum seal.
  • Accepts vacuum or pin style chucks.
  • Spring assisted latching lid with sensor interlock.  Motor stops if lid is opened while running.
  • Easily accessible, serviceable PTFE valve for vacuum chuck.
  • 6.5 in. color touchscreen HMI plus keypad.
  • Windows 7 Embedded O.S.

Manufacturer product page

Olympus Optical Microscope

Olympus BX53MRF (Reflected Frame) optical microscope.

Features:

  • 5X, 10X, 20X, 50X and 100X Bright/Dark Field objective
  • The Invisible Becomes Visible: MIX Observation
  • Create All-in-focus Images: EFI
  • Easily Move the Stage for Panorama: Instant MIA
  • Capture Both Bright and Dark Areas: HDR
  • Adaptable to Suit Observational and Analysis Preferences
  • Accommodates a Wide Range of Samples
    • Superior Optical Performance: Wave Front Aberration Control
    • Stable Color Temperature and High-Intensity White LED Illumination
    • Support Precise Measurement: Auto Calibration
    • Seamless Stitching : Image Shading Correction

Manufacturer product page

Celestron Stereo Microscope

Celestron Labs S10-60 is an all-metal bodied, low-power stereo microscope with advanced features such as high-quality glass optics, 1x and 3x objectives, 10x and 20x eyepieces and upper and lower illuminators.

Features:

  • Professional-level stereo microscope up to 60x power
  • Two sets of 10x and 20x eyepieces
  • Two sets of objective lenses: 1x and 3x – in-rotating housing
  • View specimens at 10x, 20x, 30x and 60x magnification
  • Full-metal construction with coarse focusing knob
  • Upper and lower illumination for full range of viewing
  • Two stage plates included: (1) transparent stage for bottom illumination and (1) black and white sides for enhanced viewing

Manufacturer product page

Programmable Hotplate

Torrey Pines EchoTherm HP60A Hot Plate, Programmable Aluminum

Features:

  • Temperature range: 0 - 400 °C
  • Heating area: 6 x 6 inch
  • Store up to 10 programs in memory for instant recall and use
    • Hot plate heats up to maximum temperature in approximately 2 minutes
    • Platinum RTD temperature measurement for ±1% accuracy
  • Repeat any program up to 98 times automatically.
  • Multiple temperatures, temperature ramp rates, and timed events can be stored.
  • Includes timer to 99 hours, 59 minutes with auto-off option.
  • Unit can be programmable or non-programmable in operation.
  • Offers RS-232 interface for control or recording data via a computer.

Manufacturer product page

Regular Hotplate

Thermo Scientific™ SuperNuova+™ Hotplate 

Features:

  • Temperature range: 0 - 300 °C
  • Heat to the maximum temperature in 5 minutes 
  • Heating area: 7.25 x 7.25 inch
  • Temperature stability of ±1.8°F (1°C)
  • Program and save temperature and time settings for your most common applications

Oven

Fisher Scientific™ Isotemp™ General Purpose Heating and Drying Ovens

Features:

  • Model: Gravity convection
  • Temperature range: 50° to 250°C
  • Temperature Uniformity: ±4°C
  • Temperature Stability: ±0.4°C
  • Interior dimensions: 16.3 x 12.9 x 18.9 in. (414 x 328 x 480 mm)
  • Capacity: 2.3 cu. ft.

Refrigerator

McMASTER-CARR Refrigerators for Flammables

Features:

  • Built for long-lasting safety and service, these refrigerators provide cold storage of flammable liquids in laboratory
  • Usable dimensions: 21 in (W) x 28 in (H) x 20 in (D)
  • Capacity: 6.1 cu. ft.
  • Temperature: 33 - 40 °F
  • Spec Met: CSA Certified, NFPA (National Fire Protection Agency) Code 99

Secador Desiccator

Bel-Art Secador 1.0 Desiccator with Gas Ports

Features:

  • Durastar co-polyester construction blocks 99% of UV light* and is resistant to staining, crazing and chemical attack
  • Large doors maximize access to interior space
  • Perforated shelves facilitate circulation of dry air; space for desiccant under bottom shelf
  • Easy-to-view digital hygrometer is located in the door front
  • Compact 34.1W x 41.4cmD footprint for space saving and can be stacked up to 3 units high