KLA P7 Stylus Profiler is ready for use

November 22, 2022

We are excited to announce that the new KLA Tencor P7 Stylus Profiler has been installed and is ready for use. The Tencor P-7 stylus profiler supports 2D and 3D measurements of step heights, defect surface topography, roughness and waviness, bow, and thin film stress for scans up to 150mm.

It also has the following features:

Step height scan from Nanometers to 1000µm,

Low force with constant force control from 0.03 to 50mg,

Scan full diameter of the sample without stitching,

Fully automated with sequencing and pattern recognition,

Easy-to-use software interface.

Combined with Zygo Nexview Optical Profiler, a variety of structures and materials can be characterized at West Campus Cleanroom.