We are excited that our new Electron Beam Evaporator and Reactive Ion Etcher are moved to new lab today. After several months construction, the cleanroom expansion is almost...
The AutoGlow 200 Etcher has been installed and is ready to use. Two process gases, Ar and O2, are available. The chamber can handle up to 8 inches wafer. With 13.56 MHz RF...
Yale West Campus Cleanroom will reopen on 06/03/2020 for Phase I approved research. Users who plan to access our cleanroom should complete the following steps first:
To gain...
