• Zygo Nextview Optical Profiler
  • SUSS MJB4 Mask Aligner
  • Wet Lab Fume Hoods

The Yale West Campus Cleanroom supports the research activities of scientists on West Campus and across Yale. The Cleanroom provides a controlled environment that has a low level of pollutants such as dust, airborne microbes, aerosol particles, and chemical vapors. We support research groups focused on microfluidics, providing  photolithography tools including a high resolution UV mask aligner, spin coaters, hot plates, solvent, acid and base hoods. Surface characterization tools such as the non-contact optical profiler and optical microscope are also incorporated.


January 22, 2018
Welcome Dr. Lei Wang, the Research Support Specialist who is coming to oversee our new West Campus cleanroom! Lei comes to us following a successful graduate career at the...
September 11, 2017
A SUSS MicroTec Mask Aligner (MJB4) has just been installed in West Campus Cleanroom. As the last tool to complete the photolithography setup for microfluidic device design,...
June 2, 2017
Join us on Friday, June 2, at 2pm as we open up the the newly constructed West Campus Cleanroom to our community. As has become a strong tradition, this is another...