• Zygo Nextview Optical Profiler
  • SUSS MJB4 Mask Aligner
  • Wet Lab Fume Hoods


March 15, 2021
We are excited that our new Electron Beam Evaporator and Reactive Ion Etcher are moved to new lab today. After several months construction, the cleanroom expansion is almost...
October 20, 2020
The AutoGlow 200 Etcher has been installed and is ready to use. Two process gases, Ar and O2, are available. The chamber can handle up to 8 inches wafer. With 13.56 MHz RF...
June 3, 2020
Yale West Campus Cleanroom will reopen on 06/03/2020 for Phase I approved research. Users who plan to access our cleanroom should complete the following steps first: To gain...