The Cleanroom users should acknowledge Yale West Campus Cleanroom in their publications. Please specify the instrument models as follows:
SUSS MJB4 Mask Aligner
Zygo Nexview 3D Optical Profiler


2018 Publication

1. Prashanta Kharel, Yiwen Chu, Michael Power, William H. Renninger, Robert J. Schoelkopf, and Peter T. Rakich. Ultra-high-Q phononic resonators on-chip at cryogenic temperatures. APL PHOTONICS 3, 066101 (2018).