The Cleanroom users should acknowledge Yale West Campus Cleanroom in their publications. Please specify the instrument models as follows:
SUSS MJB4 Mask Aligner
Zygo Nexview 3D Optical Profiler



1. Prashanta Kharel, Yiwen Chu, Michael Power, William H. Renninger, Robert J. Schoelkopf, and Peter T. Rakich. Ultra-high-Q phononic resonators on-chip at cryogenic temperatures. APL PHOTONICS 3, 066101 (2018).

2. Yiwen Chu, Prashanta Kharel, Taekwan Yoon, Luigi Frunzio, Peter T. Rakich, and Robert J. Schoelkopf. Creation and control of multi-phonon Fock states in a bulk acoustic-wave resonator. Nature 563, 666-670 (2018)

3. Zhiliang Bai, Yanxiang Deng, Dongjoo Kim, Zhuo Chen, Yang Xiao, and Rong Fan. An Integrated Dielectrophoresis-Trapping and Nanowell Transfer Approach to Enable Double-Sub-Poisson Single-Cell RNA Sequencing. ACS Nano (2020).