The Cleanroom users should acknowledge Yale West Campus Cleanroom in their publications. Please specify the instrument models as follows:

SUSS MJB4 Mask Aligner

Zygo Nexview 3D Optical Profiler

Oxford PlasmaPro 100 Reactive Ion Etcher

PVD Products Electron Beam Evaporator



1. Prashanta Kharel, Yiwen Chu, Michael Power, William H. Renninger, Robert J. Schoelkopf, and Peter T. Rakich. Ultra-high-Q phononic resonators on-chip at cryogenic temperatures. APL PHOTONICS 3, 066101 (2018).

2. Yiwen Chu, Prashanta Kharel, Taekwan Yoon, Luigi Frunzio, Peter T. Rakich, and Robert J. Schoelkopf. Creation and control of multi-phonon Fock states in a bulk acoustic-wave resonator. Nature 563, 666-670 (2018)

3. Zhiliang Bai, Yanxiang Deng, Dongjoo Kim, Zhuo Chen, Yang Xiao, and Rong Fan. An Integrated Dielectrophoresis-Trapping and Nanowell Transfer Approach to Enable Double-Sub-Poisson Single-Cell RNA Sequencing. ACS Nano (2020).

4. J. V. Pondick, S. Yazdani, M. Yarali, S. N. Reed, D. J. Hynek, J. J. Cha. The effect of mechanical strain on lithium staging in graphene Advanced Electronic Materials doi:10.1002/aelm.202000981 (2021)

5. Liu, S., Shah, D.S. and Kramer-Bottiglio, R. Highly stretchable multilayer electronic circuits using biphasic gallium-indium. Nat. Mater. (2021).

6. Bai Z, Lundh S, Kim D, et al. Single-cell multiomics dissection of basal and antigen-specific activation states of CD19-targeted CAR T cells. Journal for Immuno Therapy of Cancer (2021); 9:e002328. doi: 10.1136/jitc-2020-002328

7. Bai Z, Woodhouse S, Zhao Z, Arya R, Govek K, Kim D, Lundh S, Baysoy A, Sun H, Deng Y, Xiao Y, Barrett DM, Myers RM, Grupp SA, June CH, Fan R, Camara PG, Melenhorst JJ. Single-cell antigen-specific landscape of CAR T infusion product identifies determinants of CD19-positive relapse in patients with ALL. Sci Adv. (2022) Jun 10; 8(23).

8. Naijun Jin, Charles A. McLemore, David Mason, James P. Hendrie, Yizhi Luo, Megan L. Kelleher, Prashanta Kharel, Franklyn Quinlan, Scott A. Diddams, and Peter T. Rakich, “Micro-fabricated mirrors with finesse exceeding one million,” Optica 9, 965-970 (2022)

9. Neu J, Shipps CC, Guberman-Pfeffer MJ, Shen C, Srikanth V, Spies JA, Kirchhofer ND, Yalcin SE, Brudvig GW, Batista VS, Malvankar NS. Microbial biofilms as living photoconductors due to ultrafast electron transfer in cytochrome OmcS nanowires. Nat Commun. 2022 Sep 7;13(1):5150.