The Cleanroom users should acknowledge Yale West Campus Cleanroom in their publications. Please specify the instrument models as follows:
SUSS MJB4 Mask Aligner
Zygo Nexview 3D Optical Profiler



1. Prashanta Kharel, Yiwen Chu, Michael Power, William H. Renninger, Robert J. Schoelkopf, and Peter T. Rakich. Ultra-high-Q phononic resonators on-chip at cryogenic temperatures. APL PHOTONICS 3, 066101 (2018).

2. Yiwen Chu, Prashanta Kharel, Taekwan Yoon, Luigi Frunzio, Peter T. Rakich, and Robert J. Schoelkopf. Creation and control of multi-phonon Fock states in a bulk acoustic-wave resonator. Nature 563, 666-670 (2018)

3. Zhiliang Bai, Yanxiang Deng, Dongjoo Kim, Zhuo Chen, Yang Xiao, and Rong Fan. An Integrated Dielectrophoresis-Trapping and Nanowell Transfer Approach to Enable Double-Sub-Poisson Single-Cell RNA Sequencing. ACS Nano (2020).

4. J. V. Pondick, S. Yazdani, M. Yarali, S. N. Reed, D. J. Hynek, J. J. Cha. The effect of mechanical strain on lithium staging in graphene Advanced Electronic Materials doi:10.1002/aelm.202000981 (2021)

5. Liu, S., Shah, D.S. and Kramer-Bottiglio, R. Highly stretchable multilayer electronic circuits using biphasic gallium-indium. Nat. Mater. (2021).