About Us

The existing research spaces include 1200 ft² of wet and dry clean laboratories rated at Class 1000, with features standard to most cleanrooms.  The wet bay has three process hoods for acid, base, and resist applications.  They are equipped with standard utilities, integrated spin-coaters, hotplates, and sonicators.  The dry bay houses analysis instrumentation and photolithography tools including a high resolution UV mask aligner and a non-contact optical profiler.  The gowning area has room for storage for individual research groups.

In 2020, the cleanroom expansion project effectively doubles the existing cleanroom facilities, adding by a further 1200 ft² of dry lab and wet lab. The expanded space has enabled the installation of a new Electron Beam Evaporator and Reactive Ion Etcher, both of which bring state-of-the-art nanofabrication capabilities to West Campus. 

Alongside existing materials characterization technologies, users from the Energy Sciences Institute, Systems Biology Institute, Nanobiology Institute and from across Yale can now complete device manufacturing at West Campus. The facility also provides an additional venue for researchers from Applied Physics, Electrical Engineering and Material Science, further supporting collaborations and the rapid development of nanoscale science, engineering and technology at Yale.

Additionally, the Cleanroom was built to support activity that is physically disconnected from the primary research complex so the non-laboratory spaces include a conference room with shared workstations, a staff office, a breakroom, lockers, and restrooms.