About Us

The West Campus Cleanroom is located within Building 750 (Shipping & Receiving Center) with direct dedicated access along the southern exterior face of the building. 

The research spaces include 1200 ft2 of wet and dry clean laboratories rated at Class 100, with features standard to most cleanrooms.  The wet bay has three process hoods for acid, base, and resist applications.  They are equipped with standard utilities, integrated spin-coaters, hotplates, and sonicators.  The dry bay houses analysis instrumentation and photolithography tools including a high resolution UV mask aligner and a non-contact optical profiler.  The gowning area has room for storage for individual research groups.
Additionally, the Cleanroom was built to support activity that is physically disconnected from the primary research complex so the non-laboratory spaces include a conference room with shared workstations, a staff office, a breakroom, lockers, and restrooms.