Internal Usage Rates
|Equipment||Usage Rate ($/hr)|
|Suss MJB4 Mask Aligner||0|
|Zygo Nexview Profiler||0|
|UHV Electron Beam Evaporator||0|
|Oxford PlasmaPro 100 Reactive Ion Etcher||60|
SU8 photoresists are 15$/device for internal and non-profit users, 30$/device for external profit users.
Equipment fee is covered by Cleanroom fee. General solvents, acids, bases and photoresists are also provided and free to use.