Usage rates ($/hour):
|Yale (9 am - 5 pm weekdays)||Yale Off-Peak (5 pm - 9 am, weekend and Yale holidays)||
|SUSS MJB4 Mask Aligner||0||0||0||0|
|Zygo Nexview Profiler||0||0||0||0|
Equipment fee is covered by Cleanroom fee. General solvents, acids, bases and photoresists are also provided and free to use.
Training is free for all users.