Usage Rates

Usage rates ($/hour):

  Yale (9 am - 5 pm weekdays) Yale Off-Peak (5 pm - 9 am, weekend and Yale holidays)

External Non-profit

External Profit
Cleanroom 47 47 100 200
SUSS MJB4 Mask Aligner 0 0 0 0
Zygo Nexview Profiler 0 0 0 0
Spin Coater 0 0 0 0

Equipment fee is covered by Cleanroom fee. General solvents, acids, bases and photoresists are also provided and free to use.

Training is free for all users.